Investigation on TiOx/Ti/TiOx tri-layer film for integrated optical gas sensing applications
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Shim, Joonsup | ko |
| dc.contributor.author | Lim, Jinha | ko |
| dc.contributor.author | Kim, Sanghyeon | ko |
| dc.date.accessioned | 2021-12-15T06:49:17Z | - |
| dc.date.available | 2021-12-15T06:49:17Z | - |
| dc.date.created | 2021-11-25 | - |
| dc.date.created | 2021-11-25 | - |
| dc.date.issued | 2021-07 | - |
| dc.identifier.citation | OSA Optical Sensors and Sensing Congress 2021 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/290691 | - |
| dc.description.abstract | We systematically investigated the electrical characteristics of TiOx/Ti/TiOx tri-layer film for optical gas sensors on Ge-on-insulator platform. It was found that noise-equivalenttemperature-difference, which is strongly associated with limit-of-detection of gas sensors, could reach 14.56 mK. | - |
| dc.language | English | - |
| dc.publisher | Optical Society of America | - |
| dc.title | Investigation on TiOx/Ti/TiOx tri-layer film for integrated optical gas sensing applications | - |
| dc.type | Conference | - |
| dc.identifier.scopusid | 2-s2.0-85120464640 | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | OSA Optical Sensors and Sensing Congress 2021 | - |
| dc.identifier.conferencecountry | US | - |
| dc.identifier.conferencelocation | Washington, DC | - |
| dc.identifier.doi | 10.1364/SENSORS.2021.SF2D.3 | - |
| dc.contributor.localauthor | Kim, Sanghyeon | - |
- Appears in Collection
- EE-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.