Mechanical behavior of nanotwinned metallic alloy thin films나노쌍정 합금 박막의 기계적 물성에 관한 연구

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For the last decade, nanotwinned metals attracted intense research interest due to enhanced mechanical, electrical and functional properties accompanied with the unique microstructure. Focus of this research is the mechanical characterization of nanotwinned nickel-molybdenum-tungsten thin films deposited via magnetron direct current sputtering. By modifying of the chemical composition and the deposition rate, change in the fraction of twinned grain is observed: films with additional Mo content and/or films that were deposited at higher rate exhibited increased twin density. In order to evaluate the mechanical behavior, tensile tests and nanoindentation experiments were conducted. The as-deposited film with partially twinned (~59%) microstructure exhibits linear elastic response with fracture strength of 1.4 GPa. Hardness of the film increased from 7.3 GPa to 9.36 GPa with increasing density of twinned grains.
Advisors
Sim, Gi-Dongresearcher심기동researcher
Description
한국과학기술원 :기계공학과,
Publisher
한국과학기술원
Issue Date
2020
Identifier
325007
Language
eng
Description

학위논문(석사) - 한국과학기술원 : 기계공학과, 2020.2,[iv, 30 p. :]

Keywords

nanotwin▼athin film▼aNi-based alloy▼amechanical characterization technique▼amicrofabrication; 나노쌍정▼a박막▼a니켈계 합금▼a기계적 특성 측정법▼a미세가공

URI
http://hdl.handle.net/10203/284610
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=910912&flag=dissertation
Appears in Collection
ME-Theses_Master(석사논문)
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