Mechanical behavior of nanotwinned metallic alloy thin films나노쌍정 합금 박막의 기계적 물성에 관한 연구

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dc.contributor.advisorSim, Gi-Dong-
dc.contributor.advisor심기동-
dc.contributor.authorPark, Yu Hyun-
dc.date.accessioned2021-05-13T19:31:17Z-
dc.date.available2021-05-13T19:31:17Z-
dc.date.issued2020-
dc.identifier.urihttp://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=910912&flag=dissertationen_US
dc.identifier.urihttp://hdl.handle.net/10203/284610-
dc.description학위논문(석사) - 한국과학기술원 : 기계공학과, 2020.2,[iv, 30 p. :]-
dc.description.abstractFor the last decade, nanotwinned metals attracted intense research interest due to enhanced mechanical, electrical and functional properties accompanied with the unique microstructure. Focus of this research is the mechanical characterization of nanotwinned nickel-molybdenum-tungsten thin films deposited via magnetron direct current sputtering. By modifying of the chemical composition and the deposition rate, change in the fraction of twinned grain is observed: films with additional Mo content and/or films that were deposited at higher rate exhibited increased twin density. In order to evaluate the mechanical behavior, tensile tests and nanoindentation experiments were conducted. The as-deposited film with partially twinned (~59%) microstructure exhibits linear elastic response with fracture strength of 1.4 GPa. Hardness of the film increased from 7.3 GPa to 9.36 GPa with increasing density of twinned grains.-
dc.languageeng-
dc.publisher한국과학기술원-
dc.subjectnanotwin▼athin film▼aNi-based alloy▼amechanical characterization technique▼amicrofabrication-
dc.subject나노쌍정▼a박막▼a니켈계 합금▼a기계적 특성 측정법▼a미세가공-
dc.titleMechanical behavior of nanotwinned metallic alloy thin films-
dc.title.alternative나노쌍정 합금 박막의 기계적 물성에 관한 연구-
dc.typeThesis(Master)-
dc.identifier.CNRN325007-
dc.description.department한국과학기술원 :기계공학과,-
dc.contributor.alternativeauthor박유현-
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ME-Theses_Master(석사논문)
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