Patterning of ferroelectric nanodot arrays using a silicon nitride shadow mask

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We grew well-ordered arrays of ferroelectric Pb(Zr0.2Ti0.8)O-3 (PZT) nanodots on a SrRuO3/SrTiO3 substrate by pulsed laser deposition. A silicon nitride shadow mask with ordered holes was used for patterning of the PZT arrays. Each dot has a height of similar to 15 nm and a diameter of similar to 120 nm with a similar dome shape over a large area. The ferroelectric properties of individual PZT dots were investigated by piezoresponse force microscopy. A single dot could be polarized individually and the polarized state remained unrelaxed to similar to 20 min.
Publisher
AMER INST PHYSICS
Issue Date
2005-09
Language
English
Article Type
Article
Citation

APPLIED PHYSICS LETTERS, v.87, no.11, pp.113114

ISSN
0003-6951
DOI
10.1063/1.2048818
URI
http://hdl.handle.net/10203/280269
Appears in Collection
PH-Journal Papers(저널논문)
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