Patterning of ferroelectric nanodot arrays using a silicon nitride shadow mask
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Shin, HJ | ko |
| dc.contributor.author | Choi, JH | ko |
| dc.contributor.author | Yang, HJ | ko |
| dc.contributor.author | Park, YD | ko |
| dc.contributor.author | Kuk, Y | ko |
| dc.contributor.author | Kang, CJ | ko |
| dc.date.accessioned | 2021-01-28T06:15:53Z | - |
| dc.date.available | 2021-01-28T06:15:53Z | - |
| dc.date.created | 2021-01-26 | - |
| dc.date.created | 2021-01-26 | - |
| dc.date.issued | 2005-09 | - |
| dc.identifier.citation | APPLIED PHYSICS LETTERS, v.87, no.11, pp.113114 | - |
| dc.identifier.issn | 0003-6951 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/280269 | - |
| dc.description.abstract | We grew well-ordered arrays of ferroelectric Pb(Zr0.2Ti0.8)O-3 (PZT) nanodots on a SrRuO3/SrTiO3 substrate by pulsed laser deposition. A silicon nitride shadow mask with ordered holes was used for patterning of the PZT arrays. Each dot has a height of similar to 15 nm and a diameter of similar to 120 nm with a similar dome shape over a large area. The ferroelectric properties of individual PZT dots were investigated by piezoresponse force microscopy. A single dot could be polarized individually and the polarized state remained unrelaxed to similar to 20 min. | - |
| dc.language | English | - |
| dc.publisher | AMER INST PHYSICS | - |
| dc.title | Patterning of ferroelectric nanodot arrays using a silicon nitride shadow mask | - |
| dc.type | Article | - |
| dc.identifier.wosid | 000231802200058 | - |
| dc.identifier.scopusid | 2-s2.0-24944438303 | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 87 | - |
| dc.citation.issue | 11 | - |
| dc.citation.beginningpage | 113114 | - |
| dc.citation.publicationname | APPLIED PHYSICS LETTERS | - |
| dc.identifier.doi | 10.1063/1.2048818 | - |
| dc.contributor.localauthor | Yang, HJ | - |
| dc.contributor.nonIdAuthor | Shin, HJ | - |
| dc.contributor.nonIdAuthor | Choi, JH | - |
| dc.contributor.nonIdAuthor | Park, YD | - |
| dc.contributor.nonIdAuthor | Kuk, Y | - |
| dc.contributor.nonIdAuthor | Kang, CJ | - |
| dc.description.isOpenAccess | N | - |
| dc.type.journalArticle | Article | - |
| dc.subject.keywordPlus | SIZE | - |
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