Commensurability-Driven Orientation Control during Block Copolymer Directed Self-Assembly
In this study, the orientation of block copolymer (BCP) patterns in topographical templates is controlled using a simple template design rule. The orientation of the pattern is selected by using a template with one commensurate dimension and one incommensurate dimension. An array of binary states of a BCP pattern can be programmed into a desired layout by tuning of the template wall thickness.
- Publisher
- AMER CHEMICAL SOC
- Issue Date
- 2020-03
- Language
- English
- Article Type
- Article
- Citation
ACS APPLIED MATERIALS & INTERFACES, v.12, no.9, pp.10852 - 10857
- ISSN
- 1944-8244
- Appears in Collection
- RIMS Journal Papers
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