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Commensurability-Driven Orientation Control during Block Copolymer Directed Self-Assembly

Cited 5 time in webofscience Cited 4 time in scopus
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dc.contributor.authorYun, Hyun Suko
dc.contributor.authorDo, Hyung Wanko
dc.contributor.authorBerggren, Karl K.ko
dc.contributor.authorRoss, Caroline A.ko
dc.contributor.authorChoi, Hong Kyoonko
dc.date.accessioned2020-04-02T07:20:20Z-
dc.date.available2020-04-02T07:20:20Z-
dc.date.created2020-03-30-
dc.date.created2020-03-30-
dc.date.issued2020-03-
dc.identifier.citationACS APPLIED MATERIALS & INTERFACES, v.12, no.9, pp.10852 - 10857-
dc.identifier.issn1944-8244-
dc.identifier.urihttp://hdl.handle.net/10203/273794-
dc.description.abstractIn this study, the orientation of block copolymer (BCP) patterns in topographical templates is controlled using a simple template design rule. The orientation of the pattern is selected by using a template with one commensurate dimension and one incommensurate dimension. An array of binary states of a BCP pattern can be programmed into a desired layout by tuning of the template wall thickness.-
dc.languageEnglish-
dc.publisherAMER CHEMICAL SOC-
dc.titleCommensurability-Driven Orientation Control during Block Copolymer Directed Self-Assembly-
dc.typeArticle-
dc.identifier.wosid000518702300081-
dc.identifier.scopusid2-s2.0-85081079531-
dc.type.rimsART-
dc.citation.volume12-
dc.citation.issue9-
dc.citation.beginningpage10852-
dc.citation.endingpage10857-
dc.citation.publicationnameACS APPLIED MATERIALS & INTERFACES-
dc.identifier.doi10.1021/acsami.9b22104-
dc.contributor.localauthorDo, Hyung Wan-
dc.contributor.nonIdAuthorYun, Hyun Su-
dc.contributor.nonIdAuthorBerggren, Karl K.-
dc.contributor.nonIdAuthorRoss, Caroline A.-
dc.contributor.nonIdAuthorChoi, Hong Kyoon-
dc.description.isOpenAccessN-
dc.type.journalArticleArticle-
dc.subject.keywordAuthordirected self-assembly-
dc.subject.keywordAuthorblock copolymers-
dc.subject.keywordAuthornanolithography-
dc.subject.keywordAuthorgraphoepitaxy-
dc.subject.keywordAuthornanopatterns-
dc.subject.keywordPlusDENSITY MULTIPLICATION-
dc.subject.keywordPlusTHIN-FILMS-
dc.subject.keywordPlusLITHOGRAPHY-
dc.subject.keywordPlusDEVICE-
dc.subject.keywordPlusGRAPHOEPITAXY-
dc.subject.keywordPlusTEMPLATES-
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