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College of Engineering(공과대학)Dept. of Chemical and Biomolecular Engineering(생명화학공학과)CBE-Journal Papers(저널논문)

Dry etching technology in semiconductor process

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Woo, Seong-Ihl researcher

Publisher: Wiley-Blackwell

Issue Date: 1989-01

Language: English

Citation: CHEMICAL ENGINEERING & TECHNOLOGY, v.7, pp.299 - 0

ISSN: 0930-7516

URI: http://hdl.handle.net/10203/261597

Appears in Collection: CBE-Journal Papers(저널논문)

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