Design rules for self-assembled block copolymer patterns using tiled templates

Cited 55 time in webofscience Cited 0 time in scopus
  • Hit : 87
  • Download : 0
Directed self-assembly of block copolymers has been used for fabricating various nanoscale patterns, ranging from periodic lines to simple bends. However, assemblies of dense bends, junctions and line segments in a single pattern have not been achieved by using sparse templates, because no systematic template design methods for achieving such complex patterns existed. To direct a complex pattern by using a sparse template, the template needs to encode the key information contained in the final pattern, without being a simple copy of the pattern. Here we develop a set of topographic template tiles consisting of square lattices of posts with a restricted range of geometric features. The block copolymer patterns resulting from all tile arrangements are determined. By combining tiles in different ways, it is possible to predict a relatively simple template that will direct the formation of non-trivial block copolymer patterns, providing a new template design method for a complex block copolymer pattern.
Publisher
NATURE PUBLISHING GROUP
Issue Date
2014-02
Language
English
Article Type
Article
Keywords

DEVICE-ORIENTED STRUCTURES; TOPOGRAPHICAL TEMPLATES; DENSITY MULTIPLICATION; INVERSE DESIGN; THIN-FILMS; LITHOGRAPHY; ARRAYS; NANOLITHOGRAPHY; DNA; SIMULATIONS

Citation

NATURE COMMUNICATIONS, v.5

ISSN
2041-1723
DOI
10.1038/ncomms4305
URI
http://hdl.handle.net/10203/245595
Appears in Collection
MS-Journal Papers(저널논문)
Files in This Item
There are no files associated with this item.
This item is cited by other documents in WoS
⊙ Detail Information in WoSⓡ Click to see webofscience_button
⊙ Cited 55 items in WoS Click to see citing articles in records_button

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0