DC Field | Value | Language |
---|---|---|
dc.contributor.author | Chang, Jae-Byum | ko |
dc.contributor.author | Choi, Hong Kyoon | ko |
dc.contributor.author | Hannon, Adam F. | ko |
dc.contributor.author | Alexander-Katz, Alfredo | ko |
dc.contributor.author | Ross, Caroline A. | ko |
dc.contributor.author | Berggren, Karl K. | ko |
dc.date.accessioned | 2018-09-18T06:24:59Z | - |
dc.date.available | 2018-09-18T06:24:59Z | - |
dc.date.created | 2018-09-04 | - |
dc.date.created | 2018-09-04 | - |
dc.date.created | 2018-09-04 | - |
dc.date.issued | 2014-02 | - |
dc.identifier.citation | NATURE COMMUNICATIONS, v.5 | - |
dc.identifier.issn | 2041-1723 | - |
dc.identifier.uri | http://hdl.handle.net/10203/245595 | - |
dc.description.abstract | Directed self-assembly of block copolymers has been used for fabricating various nanoscale patterns, ranging from periodic lines to simple bends. However, assemblies of dense bends, junctions and line segments in a single pattern have not been achieved by using sparse templates, because no systematic template design methods for achieving such complex patterns existed. To direct a complex pattern by using a sparse template, the template needs to encode the key information contained in the final pattern, without being a simple copy of the pattern. Here we develop a set of topographic template tiles consisting of square lattices of posts with a restricted range of geometric features. The block copolymer patterns resulting from all tile arrangements are determined. By combining tiles in different ways, it is possible to predict a relatively simple template that will direct the formation of non-trivial block copolymer patterns, providing a new template design method for a complex block copolymer pattern. | - |
dc.language | English | - |
dc.publisher | NATURE PUBLISHING GROUP | - |
dc.subject | DEVICE-ORIENTED STRUCTURES | - |
dc.subject | TOPOGRAPHICAL TEMPLATES | - |
dc.subject | DENSITY MULTIPLICATION | - |
dc.subject | INVERSE DESIGN | - |
dc.subject | THIN-FILMS | - |
dc.subject | LITHOGRAPHY | - |
dc.subject | ARRAYS | - |
dc.subject | NANOLITHOGRAPHY | - |
dc.subject | DNA | - |
dc.subject | SIMULATIONS | - |
dc.title | Design rules for self-assembled block copolymer patterns using tiled templates | - |
dc.type | Article | - |
dc.identifier.wosid | 000332668000005 | - |
dc.identifier.scopusid | 2-s2.0-84894024539 | - |
dc.type.rims | ART | - |
dc.citation.volume | 5 | - |
dc.citation.publicationname | NATURE COMMUNICATIONS | - |
dc.identifier.doi | 10.1038/ncomms4305 | - |
dc.contributor.localauthor | Chang, Jae-Byum | - |
dc.contributor.nonIdAuthor | Choi, Hong Kyoon | - |
dc.contributor.nonIdAuthor | Hannon, Adam F. | - |
dc.contributor.nonIdAuthor | Alexander-Katz, Alfredo | - |
dc.contributor.nonIdAuthor | Ross, Caroline A. | - |
dc.contributor.nonIdAuthor | Berggren, Karl K. | - |
dc.description.isOpenAccess | N | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | TOPOGRAPHICAL TEMPLATES | - |
dc.subject.keywordPlus | DENSITY MULTIPLICATION | - |
dc.subject.keywordPlus | INVERSE DESIGN | - |
dc.subject.keywordPlus | LITHOGRAPHY | - |
dc.subject.keywordPlus | NANOLITHOGRAPHY | - |
dc.subject.keywordPlus | ARRAYS | - |
dc.subject.keywordPlus | ORIENTATION | - |
dc.subject.keywordPlus | TRANSISTORS | - |
dc.subject.keywordPlus | FILMS | - |
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