Microcrystalline silicon films deposited by electron cyclotron resonance plasma chemical vapor deposition using helium gas

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We have investigated the growth of microcrystalline silicon films by electron cyclotron resonance plasma chemical vapor deposition (ECR-PCVD) using He as the ECR gas at substrate temperatures in the range of 180 to 550 degrees C with He to silane ratios (He/SiH4) of 1: 4, and 9. With ratios of 4 and 9, the volume fractions of microcrystalline silicon increase with temperature and exceed 90% at 550 degrees C. To study the role of He plasma; we prepared silicon films using a layer-by-layer technique and found that long exposure to He plasma changes the structure of amorphous silicon to microcrystalline.
Publisher
JAPAN J APPLIED PHYSICS
Issue Date
1996-10
Language
English
Article Type
Article
Keywords

AMORPHOUS-SILICON; HYDROGEN

Citation

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, v.35, no.10A, pp.1241 - 1244

ISSN
0021-4922
URI
http://hdl.handle.net/10203/23873
Appears in Collection
RIMS Journal Papers
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