Browse "RIMS Collection" by Author C. Hu
Showing results 4 to 7 of 7
| Plasma Etching Antenna Effect on Oxide-Silicon Interface Reliability H. Shin; C. Hu, SOLID-STATE ELECTRONICS, v.36, no.9, pp.1356 - 1358, 1993-02 |
| Plasma Etching Charge-up Damage to Thin Oxides H. Shin; N. jha; X. Y. Qian; G. W. Hills; C. Hu, SOLID STATE TECHNOLOGY, v.36, no.8, pp.29 - 36, 1993-08 |
| Spatial Distribution of Thin Oxide Changing in Reactive Ion Etcher and MERIE Etcher H. Shin; K. Noguchi; X. Y. Qian; N. jha; G. W. Hills; C. Hu, IEEE ELECTRON DEVICE LETTERS, v.14, no.2, pp.88 - 90, 1993-02 |
| Thin Oxide Charging Current During Plasma Etching of Aluminum H. Shin; C.-C King; T. Horiuchi; C. Hu, IEEE ELECTRON DEVICE LETTERS, v.12, no.8, pp.404 - 406, 1991-08 |
Discover
Type
- 4,800 Article
- 3,515 Conference
- 1,492 Patent
Open Access
- 223 OA Article
Date issued
- 1,310 2020 - 2024
- 2,942 2010 - 2019
- 2,339 2000 - 2009
- 1,846 1990 - 1999
- 579 1980 - 1989
- 3 1964 - 1969