학위논문(박사) - 한국과학기술원 : 전기및전자공학부, 2016.8 ,[xii, 132 p. :]
Directed self-assembly; DSA defect probability; physical design; mask synthesis; machine learning; 고분자이중공중합체; 직접자기조립; 리소그라피; 회로설계; 마스크최적화
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