We report on luminance characteristics of top emission organic light-emitting diode (TEOLED) containing transparent cathode with various structures of buffer layers. Especially, we have focused on the buffer layers preventing OLED degradation from plasma damages which occur during deposition of inorganic passivation layer. The TEOLED with a double buffer layer showed much higher luminance and lower leakage current than that with single buffer layer of organic layer or inorganic layer. (C) 2008 Elsevier B.V. All rights reserved.