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Browse "School of Mechanical and Aerospace Engineering(기계항공공학부)" by Author Chegal W.

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Showing results 1 to 5 of 5

1
Azimuth calibration method in ellipsometer with imaging spectrograph

Chegal W.; Cho Y.J.; Kim H.J.; Cho H.M.; Lee Y.W.; Kim, Soohyun, Imaging Spectrometry X, v.5546, pp.400 - 405, 2004-08-02

2
Development of a focused-beam ellipsometer based on a new principle

Ye S.-H.; Kwak, Yoon Keun; Kim S.H.; Cho H.M.; Cho Y.J.; Chegal W., CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2007 International Conference on Frontiers of Characterization and Metrology, pp.69 - 73, 123, 2007-03-27

3
Fast data acquisition in imaging ellipsometry using four frame method

Chegal W.; Cho Y.J.; Cho H.M.; Lee Y.W.; Kim, Soohyun, Advanced Sensor Systems and Applications II, v.5634, pp.839 - 847, 2004-11-08

4
Mono-axial power spectrograph for a spectral imaging ellipsometer: Design and experimental results

Chegal W.; Kim, Soohyun; Kwak, Yoon Keun; Cho H.; Lee Y., MEASUREMENT SCIENCE AND TECHNOLOGY, v.14, no.5, pp.558 - 562, 2003-05

5
Multipoint process monitoring system based on an acousto-optic tunable filter (AOTF)

Kim D.; Jang WY; Kim, Soohyun; Hong JK; Lee Y.; Chegal W.; Kwak, Yoon Keun, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001), pp.202 - 206, SPIE, 2001-06-06

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