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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Azimuth calibration method in ellipsometer with imaging spectrograph

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Chegal W. / Cho Y.J. / Kim H.J. / Cho H.M. / Lee Y.W. / Kim, Soohyunresearcher
Issue Date
2004-08-02
Language
ENG
Citation

Imaging Spectrometry X, v.5546, pp.400 - 405

URI
http://hdl.handle.net/10203/141492
Appears in Collection
ME-Conference Papers(학술회의논문)
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