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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Azimuth calibration method in ellipsometer with imaging spectrograph

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dc.contributor.authorChegal W.-
dc.contributor.authorCho Y.J.-
dc.contributor.authorKim H.J.-
dc.contributor.authorCho H.M.-
dc.contributor.authorLee Y.W.-
dc.contributor.authorKim, Soohyun-
dc.date.accessioned2013-03-17T08:16:48Z-
dc.date.available2013-03-17T08:16:48Z-
dc.date.created2012-02-06-
dc.date.issued2004-08-02-
dc.identifier.citationImaging Spectrometry X, v.5546, no., pp.400 - 405-
dc.identifier.urihttp://hdl.handle.net/10203/141492-
dc.languageENG-
dc.titleAzimuth calibration method in ellipsometer with imaging spectrograph-
dc.typeConference-
dc.identifier.scopusid2-s2.0-15844375485-
dc.type.rimsCONF-
dc.citation.volume5546-
dc.citation.beginningpage400-
dc.citation.endingpage405-
dc.citation.publicationnameImaging Spectrometry X-
dc.identifier.conferencecountryUnited States-
dc.identifier.conferencecountryUnited States-
dc.contributor.localauthorKim, Soohyun-
dc.contributor.nonIdAuthorChegal W.-
dc.contributor.nonIdAuthorCho Y.J.-
dc.contributor.nonIdAuthorKim H.J.-
dc.contributor.nonIdAuthorCho H.M.-
dc.contributor.nonIdAuthorLee Y.W.-
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ME-Conference Papers(학술회의논문)
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