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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Development of a focused-beam ellipsometer based on a new principle

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Ye S.-H. / Kwak, Yoon Keunresearcher / Kim S.H. / Cho H.M. / Cho Y.J. / Chegal W.
Publisher
123
Issue Date
2007-03-27
Language
English
Citation

CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2007 International Conference on Frontiers of Characterization and Metrology, pp.69 - 73

URI
http://hdl.handle.net/10203/158407
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ME-Conference Papers(학술회의논문)
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