Browse "School of Electrical Engineering(전기및전자공학부)" by Subject forming gas annealing (FGA)
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A Comparative Study of the Curing Effects of Local and Global Thermal Annealing on a FinFET Park, Jun-Young; Lee, Geon-Beom; Choi, Yang-Kyu, IEEE JOURNAL OF THE ELECTRON DEVICES SOCIETY, v.7, no.1, pp.954 - 958, 2019-08 |
| High-Pressure Deuterium Annealing for Trap Passivation for a 3-D Integrated Structure Lee, Jung-Woo; Han, Joon-Kyu; Wang, Dong-Hyun; Yun, Seong-Yun; Oh, Jeong-Seob; Bang, Byeong-Chan; Cha, Won-Hyo; et al, IEEE TRANSACTIONS ON ELECTRON DEVICES, v.71, no.4, pp.2801 - 2804, 2024-04 |
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