Large step-phase measurement by a reduced-phase triple-illumination interferometer

Abstract

We present a reduced-phase triple-illumination interferometer (RPTII) as a novel single-shot technique to increase the precision of dual-illumination optical phase unwrapping techniques. The technique employs two measurement ranges to record both low-precision unwrapped and high-precision wrapped phases. To unwrap the high-precision phase, a hierarchical optical phase unwrapping algorithm is used with the low-precision unwrapped phase. The feasibility of this technique is demonstrated by measuring a stepped object with a height 2100 times greater than the wavelength of the source. The phase is reconstructed without applying any numerical unwrapping algorithms, and its noise level is decreased by a factor of ten. (C)2015 Optical Society of America