Application of sensitivity analysis for the design of six-degree-of-freedom measurement system

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We present a sensitivity analysis and performance evaluation of a six-degree-of-freedom measurement system that uses a diffraction grating as a cooperative target. To design the measurement system, we require a theoretical analysis of performance, such as sensitivity of each sensing direction. The intensity distributions of the diffracted beams are calculated with the scalar diffraction theory and sensitivity of the measurement system is analyzed against the variations of design parameter values. Using the results of sensitivity analysis, we design the measurement system and evaluate its performance with resolution, measurement error, and crosstalk. The resolution is less than 0.2 mm in translation and 0.5 arcsec in rotation. In experiments, measurement error and crosstalk between sensing channels are within 60.5 mm in translation and 62 arcsec in rotation.
Publisher
International Society for Optical Engineering (SPIE)
Issue Date
2001-12
Description

Copyright 2001 Society of Photo-Optical Instrumentation Engineers.

Keywords

sensitivity analysis; scalar diffraction theory; Fourier transforms; diffraction gratings; quadrant detectors

Citation

Optical engineering : the journal of the Society of Photo-optical Instrumentation Engineers, v.40 no.12, pp.2837-2844

ISSN
0091-3286
DOI
10.1117/1.1418714
URI
http://hdl.handle.net/10203/1948
Appears in Collection
ME-Journal Papers(저널논문)
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