DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, Jong-Ahn | - |
dc.contributor.author | Bae, Eui Won | - |
dc.contributor.author | Kim, Soo Hyun | - |
dc.contributor.author | Kwak, Yoon Keun | - |
dc.date.accessioned | 2007-11-14T09:20:53Z | - |
dc.date.available | 2007-11-14T09:20:53Z | - |
dc.date.issued | 2001-12 | - |
dc.identifier.citation | Optical engineering : the journal of the Society of Photo-optical Instrumentation Engineers, v.40 no.12, pp.2837-2844 | en |
dc.identifier.issn | 0091-3286 | - |
dc.identifier.uri | http://hdl.handle.net/10203/1948 | - |
dc.description | Copyright 2001 Society of Photo-Optical Instrumentation Engineers. | en |
dc.description.abstract | We present a sensitivity analysis and performance evaluation of a six-degree-of-freedom measurement system that uses a diffraction grating as a cooperative target. To design the measurement system, we require a theoretical analysis of performance, such as sensitivity of each sensing direction. The intensity distributions of the diffracted beams are calculated with the scalar diffraction theory and sensitivity of the measurement system is analyzed against the variations of design parameter values. Using the results of sensitivity analysis, we design the measurement system and evaluate its performance with resolution, measurement error, and crosstalk. The resolution is less than 0.2 mm in translation and 0.5 arcsec in rotation. In experiments, measurement error and crosstalk between sensing channels are within 60.5 mm in translation and 62 arcsec in rotation. | en |
dc.language.iso | en_US | en |
dc.publisher | International Society for Optical Engineering (SPIE) | en |
dc.subject | sensitivity analysis | en |
dc.subject | scalar diffraction theory | en |
dc.subject | Fourier transforms | en |
dc.subject | diffraction gratings | en |
dc.subject | quadrant detectors | en |
dc.title | Application of sensitivity analysis for the design of six-degree-of-freedom measurement system | en |
dc.type | Article | en |
dc.identifier.doi | 10.1117/1.1418714 | - |
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