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Showing results 1 to 9 of 9

1
Basilar membrane-inspired self-powered acoustic sensor enabled by highly sensitive multi tunable frequency band

Han, Jae Hyun; Kwak, Jun-Hyuk; Joe, Daniel Juhyung; Hong, Seong Kwang; Wang, Hee Seung; Park, Jung Hwan; Hur, Shin; et al, NANO ENERGY, v.53, pp.198 - 205, 2018-11

2
Fabrication of atomic force microscope probe with low spring constant using SU-8 photoresist

Lee, J; Shin, H; Kim, S; Hong, S; Chung, J; Park, H; Moon, J, JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, v.42, no.10A, pp.L1171 - L1174, 2003-10

3
Measurement of thermal expansion coefficient of poly-Si using microgauge sensors

Chae, Jung-Hun; Lee, Jae-Youl; Kang, Sang-Won, SPIE Vol. 3242, pp.202-211, 1997

4
MEMS 소자의 응용을 위한 실리콘 기판 위에 형성된 PZT 후막의 제조 및 평가 = Fabrication and characterization of the PZT thick film on Silicon substrate for MEMS applicationslink

전용배; Jeon, Yong-Bae; et al, 한국과학기술원, 2001

5
Stress charaterization of thin film materials and fabrication of FPW device = 박막소재의 응력특성 분석과 FPW 소자 제조link

Lee, Chang-Seung; 이창승; Wee, Dang-Moon; No, Kwang-Soo; et al, 한국과학기술원, 2000

6
Thermopower detection of single nanowire using a MEMS device

Shin, Ho Sun; Lee, Joon Sung; Jeon, Seong Gi; Yu, Jin; Song, Jae Yong, MEASUREMENT, v.51, pp.470 - 475, 2014-05

7
마이크로 머신 소자(MEMS) 패키지의 열응력에 대한 연구 = A study on the thermo-mechanical stress of MEMS device packageslink

전우석; Jeon, Woo-Seok; et al, 한국과학기술원, 1998

8
스위치 소자용 열구동형 다결정 실리콘 마이크로브릿지의 열적 구동특성 연구 = A study on the actuations characteristics of thermally-driven polycrystalline silicon microbridge for switching device applicationslink

이재열; Lee, Jae-Youl; et al, 한국과학기술원, 1999

9
테스트 패턴을 이용한 다결정 실리콘 박막의 열팽창 계수 측정에 관한 연구 = Measurement of thermal expansion coefficient of polycrystalline silicon thin film by micro test patternslink

채정헌; Chae, Jung-Hun; et al, 한국과학기술원, 1997

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