MEMS 소자의 응용을 위한 실리콘 기판 위에 형성된 PZT 후막의 제조 및 평가 = Fabrication and characterization of the PZT thick film on Silicon substrate for MEMS applications

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Advisors
노광수researcherNo, Kwang-Sooresearcher
Description
한국과학기술원: 재료공학과,
Publisher
한국과학기술원
Issue Date
2001
Identifier
165773/325007 / 000975342
Language
kor
Description

학위논문(박사) - 한국과학기술원: 재료공학과, 2001.2, [ ix, 148 p. ]

Keywords

확산방지막; 스크린 프린팅; 후막; 압전체; 초소형정밀기계; MEMS; diffusion barrier; screen printing; PZT thick film; piezoelectric

URI
http://hdl.handle.net/10203/50234
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=165773&flag=dissertation
Appears in Collection
MS-Theses_Ph.D.(박사논문)
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