DSpace at KOASAS: Spacer FinFET: Nano-scale CMOS Technology for the Terabit Era

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College of Engineering(공과대학)School of Electrical Engineering(전기및전자공학부)EE-Conference Papers(학술회의논문)

Spacer FinFET: Nano-scale CMOS Technology for the Terabit Era

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Choi, Yang-Kyu researcher / King, Tsu-Jae / Hu, Chenming

Issue Date: 2001-12

Language: ENG

Citation: International Semiconductor Device Research Symposium, pp.543 - 546

URI: http://hdl.handle.net/10203/130493

Appears in Collection: EE-Conference Papers(학술회의논문)

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