Top-Down Processed Silicon Nanowires for Thermoelectric Applications

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50 nm wide n-type silicon nanowires have been manufactured by using a top-down process in order to investigate the thermoelectric properties of silicon nanowire. Nanowire test structures with platinum heaters and temperature sensors were fabricated. The extracted temperature coefficient of resistance (TCR) of the temperature sensors was 786.6 PPM/K. Also, the extracted Seebeck coefficient and power factor of the 50 nm wide phosphorus doped n-type silicon nanowires were -118 mu V/K and 2.16 mW.K-2.m(-1).
Publisher
AMER SCIENTIFIC PUBLISHERS
Issue Date
2012-04
Language
English
Article Type
Article
Keywords

FIGURE; MERIT

Citation

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.12, no.4, pp.3552 - 3554

ISSN
1533-4880
DOI
10.1166/jnn.2012.5580
URI
http://hdl.handle.net/10203/104273
Appears in Collection
RIMS Journal Papers
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