전자기력을 이용한 3자유도 정밀 위치 결정 기구에 관한 연구

Abstract

This paper presents the design and the control of three degree-of-freedom(DOF) fine positioning device based on an electro-magnetic force. The device is designed by use of a magnetic circuit theory and it is capable of fine motion due to the electro-magnetic force. The device consists of permanent magnets, yokes and coils. The magnetic fluxes generated from the permanent magnets constitute magnetic paths through steel, whereas the coils are arranged into the gap between two surfaces of the yokes. Therefore, by supplying current to the coils, the coils are capable of some motions due to Lorentz forces. For the optimal design of the actuating system, the system parameters are defined and investigated under the given constraints. From the system modeling in small displacement, three decoupled equations of motion are obtained. To get better performance of the system, a PID controller is implemented. Experimental results are presented in terms of time response and accuracy.