다결정 실리콘 박막 트랜지스터를 위한 저온 Electron Cyclotron Resonance N2O- 플라즈마 산화 Low Temperature Electron Cyclotron Resonance N₂O-Plasma Oxidation for Polysilicon Thin Film Transistors

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Publisher
대한전기학회
Issue Date
1998
Language
Korean
Citation

전기학회논문지, v.47, no.9, pp.1458 - 1462

ISSN
1340-5551
URI
http://hdl.handle.net/10203/72165
Appears in Collection
RIMS Journal Papers
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