다결정 실리콘 박막 트랜지스터를 위한 저온 Electron Cyclotron Resonance N2O- 플라즈마 산화Low Temperature Electron Cyclotron Resonance N₂O-Plasma Oxidation for Polysilicon Thin Film Transistors
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 이진우 | ko |
| dc.contributor.author | 이내인 | ko |
| dc.contributor.author | 한철희 | ko |
| dc.date.accessioned | 2013-02-28T01:56:48Z | - |
| dc.date.available | 2013-02-28T01:56:48Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1998 | - |
| dc.identifier.citation | 전기학회논문지, v.47, no.9, pp.1458 - 1462 | - |
| dc.identifier.issn | 1340-5551 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/72165 | - |
| dc.language | Korean | - |
| dc.publisher | 대한전기학회 | - |
| dc.title | 다결정 실리콘 박막 트랜지스터를 위한 저온 Electron Cyclotron Resonance N2O- 플라즈마 산화 | - |
| dc.title.alternative | Low Temperature Electron Cyclotron Resonance N₂O-Plasma Oxidation for Polysilicon Thin Film Transistors | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 47 | - |
| dc.citation.issue | 9 | - |
| dc.citation.beginningpage | 1458 | - |
| dc.citation.endingpage | 1462 | - |
| dc.citation.publicationname | 전기학회논문지 | - |
| dc.contributor.localauthor | 한철희 | - |
| dc.contributor.nonIdAuthor | 이진우 | - |
| dc.contributor.nonIdAuthor | 이내인 | - |
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