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College of Natural Sciences(자연과학대학)Dept. of Physics(물리학과)PH-Journal Papers(저널논문)

전자 싸이클로트론 방정식 플라즈마 식각장치 내부의 F활성 원자 수송에 대한 2차원 모델링

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김용진 / 윤남식 / 김정형 / 이평우 / 송선규 / 장충석researcher / 장홍영researcher
Publisher
한국물리학회
Issue Date
1995-11
Language
Korean
Citation

응용물리, v.8, no.1, pp.60 - 67

ISSN
0374-4914
URI
http://hdl.handle.net/10203/71891
Appears in Collection
PH-Journal Papers(저널논문)
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