백색광 주사 간섭법을 이용한 박막의 두께 형상 측정법 Thin Film Thickness Profile Measurement using White Light Scanning Interferometry

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Publisher
한국광학회
Issue Date
1999-10
Language
KOR
Citation

한국광학회지, v.10, no.5, pp.373 - 378

ISSN
1225-6285
URI
http://hdl.handle.net/10203/69787
Appears in Collection
ME-Journal Papers(저널논문)
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