백색광 주사 간섭법을 이용한 박막의 두께 형상 측정법Thin Film Thickness Profile Measurement using White Light Scanning Interferometry
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김기홍 | ko |
| dc.contributor.author | 김승우 | ko |
| dc.date.accessioned | 2013-02-27T17:17:13Z | - |
| dc.date.available | 2013-02-27T17:17:13Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1999-10 | - |
| dc.identifier.citation | 한국광학회지, v.10, no.5, pp.373 - 378 | - |
| dc.identifier.issn | 1225-6285 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/69787 | - |
| dc.language | Korean | - |
| dc.publisher | 한국광학회 | - |
| dc.title | 백색광 주사 간섭법을 이용한 박막의 두께 형상 측정법 | - |
| dc.title.alternative | Thin Film Thickness Profile Measurement using White Light Scanning Interferometry | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 10 | - |
| dc.citation.issue | 5 | - |
| dc.citation.beginningpage | 373 | - |
| dc.citation.endingpage | 378 | - |
| dc.citation.publicationname | 한국광학회지 | - |
| dc.contributor.localauthor | 김승우 | - |
| dc.contributor.nonIdAuthor | 김기홍 | - |
- Appears in Collection
- ME-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.