Molybdenum-gate HfO2 CMOS FinFET technology

Publisher
IEEE
Issue Date
2004-12-13
Language
ENG
Citation

IEEE International Electron Devices Meeting, 2004 IEDM, pp.643 - 646

ISSN
0163-1918
URI
http://hdl.handle.net/10203/695
Appears in Collection
EE-Conference Papers(학술회의논문)
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