Dependence of oxygen redistribution on titanium film thickness during titanium silicide formation by rapid thermal annealing

Publisher
A V S Amer Inst Physics
Issue Date
1989-11
Language
ENG
Citation

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v.7, no.6, pp.3246 - 3250

ISSN
0734-2101
URI
http://hdl.handle.net/10203/3255
Appears in Collection
RIMS Journal Papers
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