Design methods for six-degree-of-freedom displacement measurement systems using cooperative targets

Six-degree-of-freedom displacement measurement systems generally employ various kinds of cooperative targets, and calculate displacement from the coordinate values of reflective rays. To improve the performance of measurement systems, a new design methodology is required, which considers the relationship between each axial output and the coordinate values, Jacobian matrix. Several performance indices are derived from Jacobian matrix and the design parameter values are determined through the optimization process. In a design example, the improvement of performance is verified by evaluating resolution, accuracy and crosstalk. The newly designed measurement system shows a maximum error of +/-0.5 mum for translation and +/-2 arcsec for rotation. (C) 2001 Elsevier Science Inc. All rights reserved.
Publisher
ELSEVIER SCIENCE INC
Issue Date
2002-01
Language
ENG
Keywords

6-DEGREE-OF-FREEDOM

Citation

PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, v.26, no.1, pp.99 - 104

ISSN
0141-6359
URI
http://hdl.handle.net/10203/2182
Appears in Collection
ME-Journal Papers(저널논문)
  • Hit : 453
  • Download : 7
  • Cited 0 times in thomson ci
This item is cited by other documents in WoS
⊙ Detail Information in WoSⓡClick to seewebofscience_button
⊙ Cited 28 items in WoSClick to see citing articles inrecords_button

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0