Silicon Nitride Horizontal Air-Slot Microdisk Resonators With a Nanocrystal Si Emitting Layer

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Silicon nitride (SiN) microdisk resonators with a 40-nm horizontal air slot and a nanocrystal Si (nc-Si) emitting top layer are investigated. The whole structure is fabricated using only a single deposition and lithography step, with the light-emitting layer self-aligned to excite the slot-mode within the air slot. The nc-si are excited via top-pumping using a UV laser diode, and the visible light emission from nc-Si is coupled into the whispering gallery mode (WGM) with the light concentrated in the air slot. The WGM resonances are observed via side-photoluminescence setup using a Si charge-coupled device. The feasibility of applying this structure as a biosensor is demonstrated, with an estimated surface sensitivity of 2.8 nm/nm.
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Issue Date
2013-06
Language
English
Article Type
Article
Keywords

WHISPERING-GALLERY MODES; LABEL-FREE; ON-INSULATOR; WAVE-GUIDE; LIGHT; EMISSION; LASERS; RING

Citation

IEEE PHOTONICS TECHNOLOGY LETTERS, v.25, no.11, pp.1020 - 1023

ISSN
1041-1135
DOI
10.1109/LPT.2013.2258333
URI
http://hdl.handle.net/10203/174008
Appears in Collection
NT-Journal Papers(저널논문)
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