Composition dependence of room temperature 1.54 μm Er3+ luminescence from erbium doped silicon:oxygen thin films deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition

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Issue Date
1997-12-01
Language
ENG
Citation

Proceedings of the 1997 MRS Symposium, v.486, pp.275 - 280

ISSN
0272-9172
URI
http://hdl.handle.net/10203/117942
Appears in Collection
NT-Conference Papers(학술회의논문)
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