The effect of nitrogen incorporation on surface properties of silicon oxynitride films
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Hong, Jongin | ko |
| dc.contributor.author | Kim, Yunseok | ko |
| dc.contributor.author | Paik, Hanjong | ko |
| dc.contributor.author | No, Kwangsoo | ko |
| dc.contributor.author | Lukes, Jennifer R | ko |
| dc.date.accessioned | 2013-03-11T10:46:41Z | - |
| dc.date.available | 2013-03-11T10:46:41Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2009-01 | - |
| dc.identifier.citation | PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS, v.3, pp.25 - 27 | - |
| dc.identifier.issn | 1862-6254 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/99066 | - |
| dc.description.abstract | In order to investigate the surface heterogeneity of silicon oxynitride films, we observed the nanoscale variation of the surface potential by Kelvin probe force microscopy (KFM), the molecular bonding characteristics by Fourier transform infrared spectrometry (FTIR), and the wetting behavior by contact angle measurement. Nitrogen incorporation into silicon oxynitride films influenced the decrease in the surface potential and the polar component of the surface free energy. We present the first correlation between the nanoscale measurement of the surface potential and the macroscopic measurement of the surface free energy in silicon oxynitride films grown by a standard plasma-enhanced chemical vapor deposition (PECVD) technique. (C) 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim | - |
| dc.language | English | - |
| dc.publisher | Wiley-Blackwell | - |
| dc.subject | FORCE MICROSCOPY | - |
| dc.title | The effect of nitrogen incorporation on surface properties of silicon oxynitride films | - |
| dc.type | Article | - |
| dc.identifier.wosid | 000262948100016 | - |
| dc.identifier.scopusid | 2-s2.0-70449637783 | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 3 | - |
| dc.citation.beginningpage | 25 | - |
| dc.citation.endingpage | 27 | - |
| dc.citation.publicationname | PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS | - |
| dc.identifier.doi | 10.1002/pssr.200802234 | - |
| dc.contributor.localauthor | No, Kwangsoo | - |
| dc.contributor.nonIdAuthor | Hong, Jongin | - |
| dc.contributor.nonIdAuthor | Lukes, Jennifer R | - |
| dc.type.journalArticle | Article | - |
| dc.subject.keywordPlus | FORCE MICROSCOPY | - |
- Appears in Collection
- MS-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
This item is cited by other documents in WoS
| ⊙ Detail Information in WoSⓡ | Click to see |  |
| ⊙ Cited 5 items in WoS | Click to see citing articles in |  |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.