DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, Kihyun | ko |
dc.contributor.author | Cho, Young-Man | ko |
dc.contributor.author | Nam, Byoung-Uk | ko |
dc.contributor.author | Lee, Moon Gu | ko |
dc.date.accessioned | 2013-03-11T09:32:20Z | - |
dc.date.available | 2013-03-11T09:32:20Z | - |
dc.date.created | 2012-05-02 | - |
dc.date.created | 2012-05-02 | - |
dc.date.issued | 2012-03 | - |
dc.identifier.citation | INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, v.13, no.3, pp.407 - 412 | - |
dc.identifier.issn | 2234-7593 | - |
dc.identifier.uri | http://hdl.handle.net/10203/98922 | - |
dc.description.abstract | In micromanufacturing and nanomanufacturing in the semiconductor and flat panel display industry, many kinds of positioning system that have a large working area, high speed, and high accuracy are required In this paper, the design of a mechanically decoupled dual servo (MDDS) stage is proposed and presented The stage consists of a coarse stage actuated by a linear motor and a fine stage actuated by a voice coil motor. The two stages are required to be developed independently, if possible, to save lead time and ensure the security of trade secrets; therefore, the MDDS stage is designed according to a modular design approach. A dual servo tracking controller is introduced for the MDDS by appending a fine controller to a conventional coat-se controller. Despite the modular design without mechanical coupling, a reaction force between the fine stage and coarse stage is generated by the magnetic coupling that is detrimental to positioning and tracking. Therefore, a simple compensator that reduces the effect of the reaction force is also presented Simulations and experiments are performed to evaluate the pet:performance of the MDDS stage. | - |
dc.language | English | - |
dc.publisher | KOREAN SOC PRECISION ENG | - |
dc.title | Dual Servo Stage Without Mechanical Coupling for Process of Manufacture and Inspection of Flat Panel Displays Via Modular Design Approach | - |
dc.type | Article | - |
dc.identifier.wosid | 000300961800012 | - |
dc.identifier.scopusid | 2-s2.0-84863386376 | - |
dc.type.rims | ART | - |
dc.citation.volume | 13 | - |
dc.citation.issue | 3 | - |
dc.citation.beginningpage | 407 | - |
dc.citation.endingpage | 412 | - |
dc.citation.publicationname | INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING | - |
dc.identifier.doi | 10.1007/s12541-012-0052-0 | - |
dc.contributor.nonIdAuthor | Kim, Kihyun | - |
dc.contributor.nonIdAuthor | Nam, Byoung-Uk | - |
dc.contributor.nonIdAuthor | Lee, Moon Gu | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | Dual servo stage | - |
dc.subject.keywordAuthor | Modular design | - |
dc.subject.keywordAuthor | Linear motor | - |
dc.subject.keywordAuthor | Voice coil motor | - |
dc.subject.keywordAuthor | Reaction force | - |
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