Fluorinated inorganic-organic hybrid materials (HYBRIMER) were successfully prepared from fluoroalkylsilanes (FASs) containing fluoro-alkyl functions and methacryloxypropyltrimethoxysilane (MPTMS) through a sol-gel process. The influence of concentration and fluoro-alkyl chain lengths of FASs on the physical characteristics of the fluorinated HYBRIMER films was examined. Larger fluorine contents lowered the refractive index within a range, which was closely dependent on the fluoro-alkyl chain lengths of FASs. Thermo-optic coefficients (TOC) were negative values, and the values grew with increasing fluorine contents and fluoro-alkyl chain lengths. Also, the thermal stability is enhanced by addition of fluorine in the HYBRIMER.