DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, Woo-Soo | ko |
dc.contributor.author | Jin, Jung-Ho | ko |
dc.contributor.author | Bae, Byeong-Soo | ko |
dc.date.accessioned | 2009-06-23T02:15:30Z | - |
dc.date.available | 2009-06-23T02:15:30Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2006-03 | - |
dc.identifier.citation | NANOTECHNOLOGY, v.17, no.5, pp.1212 - 1216 | - |
dc.identifier.issn | 0957-4484 | - |
dc.identifier.uri | http://hdl.handle.net/10203/9681 | - |
dc.description.abstract | A fluorinated methacryl hybrid material, with low surface tension, was used as an imprinting material for easy de-moulding in a UV-based nano-imprint process. Specifically, a method to measure the adhesive force between the poly(dimethylsiloxane) (PDMS) mould and the imprinting material, using the force-distance curve of PDMS, was suggested to represent the de-mouldability of the PDMS mould in a UV-based nano-imprint process. The fluorinated methacryl hybrid material exhibited a low adhesive force to PDMS, as well as low surface tension, and could be nano-imprinted without using an anti-sticking treatment on the PDMS mould. | - |
dc.description.sponsorship | A fluorinated methacryl hybrid material, with low surface tension, was used as an imprinting material for easy de-moulding in a UV-based nano-imprint process. Specifically, a method to measure the adhesive force between the poly(dimethylsiloxane) (PDMS) mould and the imprinting material, using the force-distance curve of PDMS, was suggested to represent the de-mouldability of the PDMS mould in a UV-based nano-imprint process. The fluorinated methacryl hybrid material exhibited a low adhesive force to PDMS, as well as low surface tension, and could be nano-imprinted without using an anti-sticking treatment on the PDMS mould. | en |
dc.language | English | - |
dc.language.iso | en_US | en |
dc.publisher | IOP PUBLISHING LTD | - |
dc.subject | NANOIMPRINT LITHOGRAPHY | - |
dc.subject | MOLECULAR-STRUCTURE | - |
dc.subject | SOFT LITHOGRAPHY | - |
dc.subject | WAVE-GUIDES | - |
dc.subject | FABRICATION | - |
dc.title | Low adhesive force of fluorinated sol-gel hybrid materials for easy de-moulding in a UV-based nano-imprint process | - |
dc.type | Article | - |
dc.identifier.wosid | 000236496400016 | - |
dc.identifier.scopusid | 2-s2.0-33244467711 | - |
dc.type.rims | ART | - |
dc.citation.volume | 17 | - |
dc.citation.issue | 5 | - |
dc.citation.beginningpage | 1212 | - |
dc.citation.endingpage | 1216 | - |
dc.citation.publicationname | NANOTECHNOLOGY | - |
dc.identifier.doi | 10.1088/0957-4484/17/5/008 | - |
dc.embargo.liftdate | 9999-12-31 | - |
dc.embargo.terms | 9999-12-31 | - |
dc.contributor.localauthor | Bae, Byeong-Soo | - |
dc.contributor.nonIdAuthor | Kim, Woo-Soo | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | NANOIMPRINT LITHOGRAPHY | - |
dc.subject.keywordPlus | MOLECULAR-STRUCTURE | - |
dc.subject.keywordPlus | SOFT LITHOGRAPHY | - |
dc.subject.keywordPlus | WAVE-GUIDES | - |
dc.subject.keywordPlus | FABRICATION | - |
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