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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Journal Papers(저널논문)

Low adhesive force of fluorinated sol-gel hybrid materials for easy de-moulding in a UV-based nano-imprint process

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dc.contributor.authorKim, Woo-Sooko
dc.contributor.authorJin, Jung-Hoko
dc.contributor.authorBae, Byeong-Sooko
dc.date.accessioned2009-06-23T02:15:30Z-
dc.date.available2009-06-23T02:15:30Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued2006-03-
dc.identifier.citationNANOTECHNOLOGY, v.17, no.5, pp.1212 - 1216-
dc.identifier.issn0957-4484-
dc.identifier.urihttp://hdl.handle.net/10203/9681-
dc.description.abstractA fluorinated methacryl hybrid material, with low surface tension, was used as an imprinting material for easy de-moulding in a UV-based nano-imprint process. Specifically, a method to measure the adhesive force between the poly(dimethylsiloxane) (PDMS) mould and the imprinting material, using the force-distance curve of PDMS, was suggested to represent the de-mouldability of the PDMS mould in a UV-based nano-imprint process. The fluorinated methacryl hybrid material exhibited a low adhesive force to PDMS, as well as low surface tension, and could be nano-imprinted without using an anti-sticking treatment on the PDMS mould.-
dc.description.sponsorshipA fluorinated methacryl hybrid material, with low surface tension, was used as an imprinting material for easy de-moulding in a UV-based nano-imprint process. Specifically, a method to measure the adhesive force between the poly(dimethylsiloxane) (PDMS) mould and the imprinting material, using the force-distance curve of PDMS, was suggested to represent the de-mouldability of the PDMS mould in a UV-based nano-imprint process. The fluorinated methacryl hybrid material exhibited a low adhesive force to PDMS, as well as low surface tension, and could be nano-imprinted without using an anti-sticking treatment on the PDMS mould.en
dc.languageEnglish-
dc.language.isoen_USen
dc.publisherIOP PUBLISHING LTD-
dc.subjectNANOIMPRINT LITHOGRAPHY-
dc.subjectMOLECULAR-STRUCTURE-
dc.subjectSOFT LITHOGRAPHY-
dc.subjectWAVE-GUIDES-
dc.subjectFABRICATION-
dc.titleLow adhesive force of fluorinated sol-gel hybrid materials for easy de-moulding in a UV-based nano-imprint process-
dc.typeArticle-
dc.identifier.wosid000236496400016-
dc.identifier.scopusid2-s2.0-33244467711-
dc.type.rimsART-
dc.citation.volume17-
dc.citation.issue5-
dc.citation.beginningpage1212-
dc.citation.endingpage1216-
dc.citation.publicationnameNANOTECHNOLOGY-
dc.identifier.doi10.1088/0957-4484/17/5/008-
dc.embargo.liftdate9999-12-31-
dc.embargo.terms9999-12-31-
dc.contributor.localauthorBae, Byeong-Soo-
dc.contributor.nonIdAuthorKim, Woo-Soo-
dc.type.journalArticleArticle-
dc.subject.keywordPlusNANOIMPRINT LITHOGRAPHY-
dc.subject.keywordPlusMOLECULAR-STRUCTURE-
dc.subject.keywordPlusSOFT LITHOGRAPHY-
dc.subject.keywordPlusWAVE-GUIDES-
dc.subject.keywordPlusFABRICATION-
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