DC Field | Value | Language |
---|---|---|
dc.contributor.author | Jung, Kyung Ho | ko |
dc.contributor.author | Bae, Byeong-Soo | ko |
dc.date.accessioned | 2009-06-23T02:11:27Z | - |
dc.date.available | 2009-06-23T02:11:27Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2008-06 | - |
dc.identifier.citation | JOURNAL OF APPLIED POLYMER SCIENCE, v.108, no.5, pp.3169 - 3176 | - |
dc.identifier.issn | 0021-8995 | - |
dc.identifier.uri | http://hdl.handle.net/10203/9680 | - |
dc.description.abstract | Photosensitive cycloaliphatic-epoxy oligosiloxane was synthesized using a nonhydrolytic sol-gel reaction for the fabrication of thick and thermally stable microstructures with high aspect ratios. Its formation was confirmed by Si-29 and pH nuclear magnetic resonance spectroscopy, small-angle neutron scattering, and Fourier transform infrared spectroscopy. Photocuring of cycloaliphatic-epoxy oligosiloxane resin resulted in a thermally stable epoxy hybrid material (epoxy hybrimer). Micropatterns with a high aspect ratio (>5), an excellent sidewall shape, and low shrinkage were fabricated directly from these materials using a simple photolithographic process. The fabricated micropattern sustained temperatures of up to 250 degrees C. (C) 2008 Wiley Periodicals, | - |
dc.language | English | - |
dc.language.iso | en_US | en |
dc.publisher | Wiley-Blackwell | - |
dc.subject | PHOTOINITIATED CATIONIC-POLYMERIZATION | - |
dc.subject | HARD COATINGS | - |
dc.subject | PHOTOPOLYMERIZATION | - |
dc.subject | PHOTORESIST | - |
dc.subject | INHIBITION | - |
dc.subject | MONOMERS | - |
dc.subject | RESINS | - |
dc.subject | GLASS | - |
dc.title | Synthesis and characterization of photopatternable epoxy hybrid materials for the fabrication of thick and thermally stable microstructures with a high aspect ratio | - |
dc.type | Article | - |
dc.identifier.wosid | 000255043100051 | - |
dc.identifier.scopusid | 2-s2.0-43249097642 | - |
dc.type.rims | ART | - |
dc.citation.volume | 108 | - |
dc.citation.issue | 5 | - |
dc.citation.beginningpage | 3169 | - |
dc.citation.endingpage | 3176 | - |
dc.citation.publicationname | JOURNAL OF APPLIED POLYMER SCIENCE | - |
dc.identifier.doi | 10.1002/app.27966 | - |
dc.embargo.liftdate | 9999-12-31 | - |
dc.embargo.terms | 9999-12-31 | - |
dc.contributor.localauthor | Bae, Byeong-Soo | - |
dc.contributor.nonIdAuthor | Jung, Kyung Ho | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | lithography | - |
dc.subject.keywordAuthor | nanocomposites | - |
dc.subject.keywordAuthor | oligomers | - |
dc.subject.keywordAuthor | photopolymerization | - |
dc.subject.keywordAuthor | polysiloxanes | - |
dc.subject.keywordPlus | PHOTOINITIATED CATIONIC-POLYMERIZATION | - |
dc.subject.keywordPlus | HARD COATINGS | - |
dc.subject.keywordPlus | PHOTOPOLYMERIZATION | - |
dc.subject.keywordPlus | PHOTORESIST | - |
dc.subject.keywordPlus | INHIBITION | - |
dc.subject.keywordPlus | MONOMERS | - |
dc.subject.keywordPlus | RESINS | - |
dc.subject.keywordPlus | GLASS | - |
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