DC Field | Value | Language |
---|---|---|
dc.contributor.author | Jeong, Seong-Jun | ko |
dc.contributor.author | Kim, Sang Ouk | ko |
dc.date.accessioned | 2013-03-09T06:10:09Z | - |
dc.date.available | 2013-03-09T06:10:09Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2011 | - |
dc.identifier.citation | JOURNAL OF MATERIALS CHEMISTRY, v.21, no.16, pp.5856 - 5859 | - |
dc.identifier.issn | 0959-9428 | - |
dc.identifier.uri | http://hdl.handle.net/10203/95556 | - |
dc.description.abstract | We introduce soft-graphoepitaxy, a cost-effective, truly scalable, ultralarge-area block copolymer lithography. Soft graphoepitaxy employs a disposable photoresist prepattern attainable by conventional lithography, such as ArF lithography or I-line lithography, to direct lateral nanodomain ordering in block copolymer thin films. Since the organic photoresist prepattern is readily disposable, this approach provides laterally ordered self-assembled nanopatterns and corresponding pattern transferred functional nanostructures without any trace of the structure directing prepattern. Furthermore, the microscale photoresist pattern can be transformed into a sub-30 nm scale ultrafine lamellar pattern over an arbitrary large area via a scalable soft-graphoepitaxy principle. | - |
dc.language | English | - |
dc.publisher | ROYAL SOC CHEMISTRY | - |
dc.subject | PATTERNS | - |
dc.subject | PHOTORESIST | - |
dc.subject | TEMPLATES | - |
dc.subject | POLYMERS | - |
dc.subject | ARRAYS | - |
dc.title | Ultralarge-area block copolymer lithography via soft graphoepitaxy | - |
dc.type | Article | - |
dc.identifier.wosid | 000289260000002 | - |
dc.identifier.scopusid | 2-s2.0-79955597252 | - |
dc.type.rims | ART | - |
dc.citation.volume | 21 | - |
dc.citation.issue | 16 | - |
dc.citation.beginningpage | 5856 | - |
dc.citation.endingpage | 5859 | - |
dc.citation.publicationname | JOURNAL OF MATERIALS CHEMISTRY | - |
dc.identifier.doi | 10.1039/c0jm04248j | - |
dc.contributor.localauthor | Kim, Sang Ouk | - |
dc.contributor.nonIdAuthor | Jeong, Seong-Jun | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | PATTERNS | - |
dc.subject.keywordPlus | PHOTORESIST | - |
dc.subject.keywordPlus | TEMPLATES | - |
dc.subject.keywordPlus | POLYMERS | - |
dc.subject.keywordPlus | ARRAYS | - |
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