High speed phase shifting interferometry using injection locking of the laser frequency to the resonant modes of a confocal Fabry-Perot cavity

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We present a high speed phase shifting interferometer which utilizes the self injection locking of a frequency tunable laser diode. By using a confocal Fabry-Perot cavity made of ultra low expansion glass, and linearly modulating the laser diode current, the laser frequency could be injection locked to the resonant modes of the Fabry-Perot cavity consecutively. It provided equal phase steps to the interferograms which are ideal to be analyzed by the Carre algorithm. The phase step error was evaluated to be about 3 MHz which corresponds to 0.2 nm in length measurement. With this technique, profile measurements are insensitive to external vibration since four 640 x 480 pixels images can be acquired within 4 ms. Difference of two profile measurements, each made with and without vibration isolation, respectively, was evaluated to be 0.5 nm (rms). (C) 2009 Optical Society of America
Publisher
Optical Soc Amer
Issue Date
2009-02
Language
English
Article Type
Article
Keywords

DIODE

Citation

OPTICS EXPRESS, v.17, no.3, pp.1442 - 1446

ISSN
1094-4087
DOI
10.1364/OE.17.001442
URI
http://hdl.handle.net/10203/94693
Appears in Collection
PH-Journal Papers(저널논문)
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