DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kang, Chu-Shik | ko |
dc.contributor.author | Kim, Jong-Ahn | ko |
dc.contributor.author | Eom, Tae Bong | ko |
dc.contributor.author | Jang, Roma | ko |
dc.contributor.author | Park, Hae Yong | ko |
dc.contributor.author | Kim, Jae Wan | ko |
dc.date.accessioned | 2013-03-08T23:44:26Z | - |
dc.date.available | 2013-03-08T23:44:26Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2009-02 | - |
dc.identifier.citation | OPTICS EXPRESS, v.17, no.3, pp.1442 - 1446 | - |
dc.identifier.issn | 1094-4087 | - |
dc.identifier.uri | http://hdl.handle.net/10203/94693 | - |
dc.description.abstract | We present a high speed phase shifting interferometer which utilizes the self injection locking of a frequency tunable laser diode. By using a confocal Fabry-Perot cavity made of ultra low expansion glass, and linearly modulating the laser diode current, the laser frequency could be injection locked to the resonant modes of the Fabry-Perot cavity consecutively. It provided equal phase steps to the interferograms which are ideal to be analyzed by the Carre algorithm. The phase step error was evaluated to be about 3 MHz which corresponds to 0.2 nm in length measurement. With this technique, profile measurements are insensitive to external vibration since four 640 x 480 pixels images can be acquired within 4 ms. Difference of two profile measurements, each made with and without vibration isolation, respectively, was evaluated to be 0.5 nm (rms). (C) 2009 Optical Society of America | - |
dc.language | English | - |
dc.publisher | Optical Soc Amer | - |
dc.subject | DIODE | - |
dc.title | High speed phase shifting interferometry using injection locking of the laser frequency to the resonant modes of a confocal Fabry-Perot cavity | - |
dc.type | Article | - |
dc.identifier.wosid | 000263432400031 | - |
dc.identifier.scopusid | 2-s2.0-59749106315 | - |
dc.type.rims | ART | - |
dc.citation.volume | 17 | - |
dc.citation.issue | 3 | - |
dc.citation.beginningpage | 1442 | - |
dc.citation.endingpage | 1446 | - |
dc.citation.publicationname | OPTICS EXPRESS | - |
dc.identifier.doi | 10.1364/OE.17.001442 | - |
dc.contributor.localauthor | Park, Hae Yong | - |
dc.contributor.nonIdAuthor | Kang, Chu-Shik | - |
dc.contributor.nonIdAuthor | Kim, Jong-Ahn | - |
dc.contributor.nonIdAuthor | Eom, Tae Bong | - |
dc.contributor.nonIdAuthor | Kim, Jae Wan | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | DIODE | - |
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