DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kwon J.-D. | ko |
dc.contributor.author | Jeong S.-J. | ko |
dc.contributor.author | Kang J.-W. | ko |
dc.contributor.author | Kim D.-G. | ko |
dc.contributor.author | Kim J.-K. | ko |
dc.contributor.author | Rha J.-J. | ko |
dc.contributor.author | Nam K.-S. | ko |
dc.contributor.author | Kwon S.-H. | ko |
dc.date.accessioned | 2013-03-08T21:14:50Z | - |
dc.date.available | 2013-03-08T21:14:50Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2009 | - |
dc.identifier.citation | JOURNAL OF THE ELECTROCHEMICAL SOCIETY, v.156, no.11, pp.H832 - H835 | - |
dc.identifier.issn | 0013-4651 | - |
dc.identifier.uri | http://hdl.handle.net/10203/94317 | - |
dc.description.abstract | A cubic delta-TaN thin film with an electrical resistivity of 400 mu Omega cm was successfully obtained by suppressing the formation of Ta(3)N(5) using two-step atomic layer deposition independent of NH(3) dosage. The deposition cycle involved two chemical reaction steps: The formation of elemental tantalum (Ta) by reducing tantalum pentafluoride (TaF(5)) with hydrogen plasma and the subsequent nitridation of the preformed Ta with NH(3) at 200-350 degrees C. The microstructure of the preformed Ta was beta-Ta phase with an electrical resistivity of 220 mu Omega cm, which was formed without regard to the deposition temperature. At a deposition temperature of less than 250 degrees C, cubic delta-TaN with a Ta/N ratio of 1 was achieved independent of the NH(3) dosage. However, at a deposition temperature of greater than 300 degrees C, the resistivity of Ta-N-based thin film increased abruptly as the NH(3) dosage exceeded 16.08 x 10(19) molecules/cm(3) due to the formation of Ta(3)N(5). (C) 2009 The Electrochemical Society. [DOI:10.1149/1.3223989] All rights reserved. | - |
dc.language | English | - |
dc.publisher | ELECTROCHEMICAL SOC INC | - |
dc.subject | CHEMICAL-VAPOR-DEPOSITION | - |
dc.subject | THIN-FILMS | - |
dc.subject | COPPER METALLIZATION | - |
dc.subject | GROWTH | - |
dc.title | Low Temperature Two-Step Atomic Layer Deposition of Tantalum Nitride for Cu Diffusion Barrier | - |
dc.type | Article | - |
dc.identifier.wosid | 000270457600063 | - |
dc.identifier.scopusid | 2-s2.0-70349745544 | - |
dc.type.rims | ART | - |
dc.citation.volume | 156 | - |
dc.citation.issue | 11 | - |
dc.citation.beginningpage | H832 | - |
dc.citation.endingpage | H835 | - |
dc.citation.publicationname | JOURNAL OF THE ELECTROCHEMICAL SOCIETY | - |
dc.identifier.doi | 10.1149/1.3223989 | - |
dc.contributor.localauthor | Jeong S.-J. | - |
dc.contributor.nonIdAuthor | Kwon J.-D. | - |
dc.contributor.nonIdAuthor | Kang J.-W. | - |
dc.contributor.nonIdAuthor | Kim D.-G. | - |
dc.contributor.nonIdAuthor | Kim J.-K. | - |
dc.contributor.nonIdAuthor | Rha J.-J. | - |
dc.contributor.nonIdAuthor | Nam K.-S. | - |
dc.contributor.nonIdAuthor | Kwon S.-H. | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | CHEMICAL-VAPOR-DEPOSITION | - |
dc.subject.keywordPlus | THIN-FILMS | - |
dc.subject.keywordPlus | COPPER METALLIZATION | - |
dc.subject.keywordPlus | GROWTH | - |
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