DC Field | Value | Language |
---|---|---|
dc.contributor.author | Jeong, Hyeon-Su | ko |
dc.contributor.author | Kim, Yun-Ho | ko |
dc.contributor.author | Lee, Ji-Sun | ko |
dc.contributor.author | Kim, Jung-Hyun | ko |
dc.contributor.author | Srinivasarao, Mohan | ko |
dc.contributor.author | Jung, Hee-Tae | ko |
dc.date.accessioned | 2013-03-08T17:40:26Z | - |
dc.date.available | 2013-03-08T17:40:26Z | - |
dc.date.created | 2012-03-07 | - |
dc.date.created | 2012-03-07 | - |
dc.date.issued | 2012-01 | - |
dc.identifier.citation | ADVANCED MATERIALS, v.24, no.3, pp.381 - + | - |
dc.identifier.issn | 0935-9648 | - |
dc.identifier.uri | http://hdl.handle.net/10203/93777 | - |
dc.description.abstract | A lithographic scheme is reported that uses a cholesteric liquid crystal with its helical axis in the plane of the sample as a "mask" for imprinting patterns in a photoresist over a large area. On the application of an electric field the cholesteric liquid crystals produce a texture that acts as a lattice of cylindrical lenses for one polarization of a light beam. This is used in photolithography to create parallel lines over large areas. | - |
dc.language | English | - |
dc.publisher | WILEY-BLACKWELL | - |
dc.subject | DIFFRACTIVE-OPTICS FABRICATION | - |
dc.subject | GRAY-SCALE MASKS | - |
dc.subject | LIQUID-CRYSTALS | - |
dc.subject | INSTABILITY | - |
dc.subject | POLYMER | - |
dc.subject | VOLTAGE | - |
dc.subject | DNA | - |
dc.title | Chiral Nematic Fluids as Masks for Lithography | - |
dc.type | Article | - |
dc.identifier.wosid | 000298945100009 | - |
dc.identifier.scopusid | 2-s2.0-84862934298 | - |
dc.type.rims | ART | - |
dc.citation.volume | 24 | - |
dc.citation.issue | 3 | - |
dc.citation.beginningpage | 381 | - |
dc.citation.endingpage | + | - |
dc.citation.publicationname | ADVANCED MATERIALS | - |
dc.identifier.doi | 10.1002/adma.201103817 | - |
dc.contributor.localauthor | Jung, Hee-Tae | - |
dc.contributor.nonIdAuthor | Kim, Yun-Ho | - |
dc.contributor.nonIdAuthor | Srinivasarao, Mohan | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | cholesteric liquid crystals | - |
dc.subject.keywordAuthor | lithography | - |
dc.subject.keywordAuthor | photomasks | - |
dc.subject.keywordAuthor | self-assembly | - |
dc.subject.keywordPlus | DIFFRACTIVE-OPTICS FABRICATION | - |
dc.subject.keywordPlus | GRAY-SCALE MASKS | - |
dc.subject.keywordPlus | LIQUID-CRYSTALS | - |
dc.subject.keywordPlus | INSTABILITY | - |
dc.subject.keywordPlus | POLYMER | - |
dc.subject.keywordPlus | VOLTAGE | - |
dc.subject.keywordPlus | DNA | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.