DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, Yun-Ho | ko |
dc.contributor.author | Lee, Jeong-Oen | ko |
dc.contributor.author | Jeong, Hyeon-Su | ko |
dc.contributor.author | Kim, Jung-Hyun | ko |
dc.contributor.author | Yoon, Eun-Kyung | ko |
dc.contributor.author | Yoon, Dong-Ki | ko |
dc.contributor.author | Yoon, Jun-Bo | ko |
dc.contributor.author | Jung, Hee-Tae | ko |
dc.date.accessioned | 2013-03-08T17:02:26Z | - |
dc.date.available | 2013-03-08T17:02:26Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2010-06 | - |
dc.identifier.citation | ADVANCED MATERIALS, v.22, no.22, pp.2416 - 2416 | - |
dc.identifier.issn | 0935-9648 | - |
dc.identifier.uri | http://hdl.handle.net/10203/93669 | - |
dc.description.abstract | A photomask that combines two imaging elements (microlens arrays and clear windows) in one structure has been developed by using toric focal conic domain (TFCD) micro arrays of smectic liquid crystals. Their application as optically selective photomasks by simply adjusting (i) the illumination dose, (ii) the size of TFCD array mask, and (iii) the tone of photoresist (PR) is demonstrated (see figure). | - |
dc.language | English | - |
dc.publisher | WILEY-V C H VERLAG GMBH | - |
dc.subject | FOCAL CONIC DOMAINS | - |
dc.subject | PROJECTION PHOTOLITHOGRAPHY | - |
dc.subject | 2-DIMENSIONAL ARRAYS | - |
dc.subject | FABRICATION | - |
dc.subject | MICROSPHERES | - |
dc.title | Optically Selective Microlens Photomasks Using Self-Assembled Smectic Liquid Crystal Defect Arrays | - |
dc.type | Article | - |
dc.identifier.wosid | 000279450700002 | - |
dc.identifier.scopusid | 2-s2.0-77953493496 | - |
dc.type.rims | ART | - |
dc.citation.volume | 22 | - |
dc.citation.issue | 22 | - |
dc.citation.beginningpage | 2416 | - |
dc.citation.endingpage | 2416 | - |
dc.citation.publicationname | ADVANCED MATERIALS | - |
dc.identifier.doi | 10.1002/adma.200903728 | - |
dc.embargo.liftdate | 9999-12-31 | - |
dc.embargo.terms | 9999-12-31 | - |
dc.contributor.localauthor | Yoon, Dong-Ki | - |
dc.contributor.localauthor | Yoon, Jun-Bo | - |
dc.contributor.localauthor | Jung, Hee-Tae | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | FOCAL CONIC DOMAINS | - |
dc.subject.keywordPlus | PROJECTION PHOTOLITHOGRAPHY | - |
dc.subject.keywordPlus | 2-DIMENSIONAL ARRAYS | - |
dc.subject.keywordPlus | FABRICATION | - |
dc.subject.keywordPlus | MICROSPHERES | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.