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College of Engineering(공과대학)Dept. of Chemical and Biomolecular Engineering(생명화학공학과)CBE-Journal Papers(저널논문)

Optically Selective Microlens Photomasks Using Self-Assembled Smectic Liquid Crystal Defect Arrays

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dc.contributor.authorKim, Yun-Hoko
dc.contributor.authorLee, Jeong-Oenko
dc.contributor.authorJeong, Hyeon-Suko
dc.contributor.authorKim, Jung-Hyunko
dc.contributor.authorYoon, Eun-Kyungko
dc.contributor.authorYoon, Dong-Kiko
dc.contributor.authorYoon, Jun-Boko
dc.contributor.authorJung, Hee-Taeko
dc.date.accessioned2013-03-08T17:02:26Z-
dc.date.available2013-03-08T17:02:26Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued2010-06-
dc.identifier.citationADVANCED MATERIALS, v.22, no.22, pp.2416 - 2416-
dc.identifier.issn0935-9648-
dc.identifier.urihttp://hdl.handle.net/10203/93669-
dc.description.abstractA photomask that combines two imaging elements (microlens arrays and clear windows) in one structure has been developed by using toric focal conic domain (TFCD) micro arrays of smectic liquid crystals. Their application as optically selective photomasks by simply adjusting (i) the illumination dose, (ii) the size of TFCD array mask, and (iii) the tone of photoresist (PR) is demonstrated (see figure).-
dc.languageEnglish-
dc.publisherWILEY-V C H VERLAG GMBH-
dc.subjectFOCAL CONIC DOMAINS-
dc.subjectPROJECTION PHOTOLITHOGRAPHY-
dc.subject2-DIMENSIONAL ARRAYS-
dc.subjectFABRICATION-
dc.subjectMICROSPHERES-
dc.titleOptically Selective Microlens Photomasks Using Self-Assembled Smectic Liquid Crystal Defect Arrays-
dc.typeArticle-
dc.identifier.wosid000279450700002-
dc.identifier.scopusid2-s2.0-77953493496-
dc.type.rimsART-
dc.citation.volume22-
dc.citation.issue22-
dc.citation.beginningpage2416-
dc.citation.endingpage2416-
dc.citation.publicationnameADVANCED MATERIALS-
dc.identifier.doi10.1002/adma.200903728-
dc.embargo.liftdate9999-12-31-
dc.embargo.terms9999-12-31-
dc.contributor.localauthorYoon, Dong-Ki-
dc.contributor.localauthorYoon, Jun-Bo-
dc.contributor.localauthorJung, Hee-Tae-
dc.type.journalArticleArticle-
dc.subject.keywordPlusFOCAL CONIC DOMAINS-
dc.subject.keywordPlusPROJECTION PHOTOLITHOGRAPHY-
dc.subject.keywordPlus2-DIMENSIONAL ARRAYS-
dc.subject.keywordPlusFABRICATION-
dc.subject.keywordPlusMICROSPHERES-
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