DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, Ran-Young | ko |
dc.contributor.author | Kim, Ho Gi | ko |
dc.contributor.author | Yoon, Soon-Gil | ko |
dc.date.accessioned | 2013-03-07T06:57:44Z | - |
dc.date.available | 2013-03-07T06:57:44Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2008 | - |
dc.identifier.citation | JOURNAL OF THE ELECTROCHEMICAL SOCIETY, v.155, no.2, pp.D137 - D140 | - |
dc.identifier.issn | 0013-4651 | - |
dc.identifier.uri | http://hdl.handle.net/10203/89647 | - |
dc.description.abstract | The Ge1-xTex chalcogenide thin films for phase change memory applications were prepared on TiAlN (30 nm)/SiO2 (100 nm)/Si substrates by metallorganic chemical vapor deposition (MOCVD) using Ge(allyl)(4)(Ge(C3H5) 4),Sb(iPr)(3)(Sb(C3H7)(3)), and Te(tBu)(2)(Te(C4H9)(2)) precursors. The Ge1- xTex films were grown by the tellurium deposition at 230-250 degrees C on Ge films deposited on a TiAlN electrode in the presence of Sb at 370 degrees C. The Ge1- xTex film growth by the tellurium deposition on Ge films depends on both the tellurium deposition temperature and the deposition time. The Ge and Te in the films deposited on a confined structure of 500 nm in diameter and 200 nm in depth shows a homogeneous distribution, and their distribution was consistent with the films deposited on a planar structure. (c) 2007 The Electrochemical Society. | - |
dc.language | English | - |
dc.publisher | Electrochemical Soc Inc | - |
dc.subject | SILVER | - |
dc.title | Characterization of Ge1-xTex chalcogenide thin films deposited by MOCVD for phase change memory applications | - |
dc.type | Article | - |
dc.identifier.wosid | 000251906800042 | - |
dc.identifier.scopusid | 2-s2.0-37549032489 | - |
dc.type.rims | ART | - |
dc.citation.volume | 155 | - |
dc.citation.issue | 2 | - |
dc.citation.beginningpage | D137 | - |
dc.citation.endingpage | D140 | - |
dc.citation.publicationname | JOURNAL OF THE ELECTROCHEMICAL SOCIETY | - |
dc.identifier.doi | 10.1149/1.2815603 | - |
dc.contributor.localauthor | Kim, Ho Gi | - |
dc.contributor.nonIdAuthor | Yoon, Soon-Gil | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | SILVER | - |
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