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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Journal Papers(저널논문)

Effects of annealing conditions on the crystallization and grain growth of metastable Ge2Sb2Te5

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dc.contributor.authorPark, YJko
dc.contributor.authorLee, JeongYongko
dc.contributor.authorYoum, MSko
dc.contributor.authorKim, YTko
dc.date.accessioned2013-03-07T01:25:54Z-
dc.date.available2013-03-07T01:25:54Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued2005-01-
dc.identifier.citationJAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, v.44, pp.326 - 327-
dc.identifier.issn0021-4922-
dc.identifier.urihttp://hdl.handle.net/10203/89084-
dc.description.abstractThe Ge2Sb2Te5 thin films deposited by a sputtering method on a SiO2/Si substrate were annealed. and subjected to transmission electron microscopy in order to investigate the crystallization and growth of the metastable Ge2Sb2Te5. The metastable Ge2Sb2Te5 was initially crystallized with 10-nm-sized grains and its sheet resistance was still as high as in the amorphous state. Sheet resistance was abruptly decreased at the grain growth stage after the crystallization.-
dc.languageEnglish-
dc.publisherJAPAN SOC APPLIED PHYSICS-
dc.subjectTHIN-FILMS-
dc.subjectCRYSTAL NUCLEATION-
dc.subjectMICROSCOPY-
dc.titleEffects of annealing conditions on the crystallization and grain growth of metastable Ge2Sb2Te5-
dc.typeArticle-
dc.identifier.wosid000226996600069-
dc.identifier.scopusid2-s2.0-15544388076-
dc.type.rimsART-
dc.citation.volume44-
dc.citation.beginningpage326-
dc.citation.endingpage327-
dc.citation.publicationnameJAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS-
dc.contributor.localauthorLee, JeongYong-
dc.contributor.nonIdAuthorPark, YJ-
dc.contributor.nonIdAuthorYoum, MS-
dc.contributor.nonIdAuthorKim, YT-
dc.type.journalArticleArticle-
dc.subject.keywordAuthorGe2Sb2Te5-
dc.subject.keywordAuthorTEM-
dc.subject.keywordAuthorrapid thermal annealing-
dc.subject.keywordAuthorcrystallization-
dc.subject.keywordAuthorgrain growth-
dc.subject.keywordPlusTHIN-FILMS-
dc.subject.keywordPlusCRYSTAL NUCLEATION-
dc.subject.keywordPlusMICROSCOPY-
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MS-Journal Papers(저널논문)
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